大面积金刚石膜沉积过程中的热应力分析

Thermal Stress Analysis of Large Area Diamond Films

摘要: 应用实际工作状态的边界条件计算了金刚石膜中的热应力分布,并用实验手段进行了验证.结果认为,金刚石膜的热应力沿径向是不均匀的,中间的热应力要比边部的大,主要是压应力.这种很大的压应力,容易引起金刚石膜的炸裂.

Abstract: The distribution of the thermal stress of large area diamond films is given by applying the actual boundary condition, and it is checked by experiments. The result is that the thermal stress of large area diamond films is not uniform, the thermal stress in the middle of large area diamond films is lager than that in the edge of large area diamond films, the press stress is the mainly part of the thermal stress. The crack of diamond films is mainly duo to the large press stress.