钢表面化学气相沉积钽涂层的研究

Studg of Tantalum Coating on Steel by Chemical Vapour Deposition

    摘要
  • 摘要: 本文研究了Ta-Cl2-H2体系在45钢表面化学气相沉积钽涂层工艺,讨论了钽的沉积速度与温度、五氯化钽和氢气压力之间的关系。本文还扼要介绍了用金相、x射线衍射和电子探针分析等方法测定涂层结构的研究结果。腐蚀试验结果表明,涂层样品在37.7%HCl,63%H2SO4介质中具有很高的抗蚀能力,其腐蚀速率比未涂层的可降低2～3个数量级。

     

    Abstract: A tantalum coating process on 45 steel by chemical vapour deposition was studied in the Ta-Cl2-H2 system.Deposit rate of tantalum associated with temperature and partial pressure of TaCl5 and H2 was investigeted.Coating stru-ctures examined by metallogaphy,x-ray diffraction and electroprobe analysis methods ware also described.Corrosion experimental results in 37.7% HCl and 63% H2SO4 Solution show that corrosion rate of the coated samples is 2-3 ord ers lower then that of uncoated samples.

     

    • HTML全文
    • 参考文献(0)
    • 相关文章
    • 施引文献
  • 资源附件(0)

/

返回文章
返回