Abstract: Titanium nitride can be coated on the steel-base and cemented-carbides to improve the resistant to wear and corrosion.
The effect of different N₂/H₂ ratios on the lattice parameter, hardness and the rate of the TiN deposition are researched in this paper. The results show that when optimum N₂/H₂ ratio appriximates to 0.5, the stoichiometric TiN will be formed. The hardness and the deposition rate of TiN film reach their maximum, and the lifetime of the treated surface increases by three times as compared with that of untreated ones.