阳极氧化制备铝磁性膜的研究
Investigation of Anodizing Technology for Aluminium Megnetic Films
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摘要: 对阳极氧化技术制备铝磁性膜进行了实验研究。用SEM,ESCA,RBS等表面分析手段对Al磁性膜的形貌、大小、厚度以及磁性膜中的元素分布作了分析,并测量了不同工艺条件下磁性膜的矩形比。Abstract: Anodizing technology for aluminium magnetic films were investigated. The image, size, thickness and the distribution of elements in aluminium magnetic films were analyzed by using SEM, ESCA and RBS. Also, the rectangle rations of the films were measured in our study.