大面积金刚石膜的均匀沉积

Uniformity of Large Area Diamond Films

摘要: 研究了大面积金刚石膜沉积过程中的均匀性问题和金刚石膜质量的均匀性问题.研究表明:用于生长金刚石膜的大面积磁旋转等离子体电弧是均匀的,能使气体混合均匀:金刚石膜在形核阶段是均匀的;金刚石膜在生长阶段是均匀的,有利于提高成膜几率:沉积后的金刚石膜的质量是均匀的.大面积磁控长通道等离子矩能生长均匀的金刚石膜,可用于金刚石膜的研究和工业生产,

Abstract: The uniformity of large area diamond filrns in deposition process and quality of diamond films is researched. The results show tha the DC arc used for deposition of diamond films is uniform. Diaxnond films are uniform in the process of nucleation and the growh. The quslity of large area diamond films is uniform.