Abstract: Titanium surface treatment has been carried out by using glow plasma oxygenizing for improving the hardness and wear resistance. The results indicate that there exist a certain realationship beetween the thickness of the oxidation layer and the oxygen partial pressure, temprature and time. Especially in the condition of hollow cathode dischage, the ion bombardment enhances ionization of oxygen, promotes the oxygen permeation and facilitates the formation of the oxide of low valence states of Ti. The hardness of TiO formed on the titanium substrate approachs that of TiN.