CVD金刚石膜中的缺陷

Defects in CVD Diamond Films

摘要: 研究了利用直流电弧等离子体喷射（DC Arc Plasma Jet）的制备的大面积金刚石膜中的缺陷问题.研究表明:金刚石膜中的缺陷包括表面缺陷、晶内缺陷和晶界缺陷,以及由于内应力产生的金刚石膜宏观和微观裂纹.金刚石膜中的缺陷与制备工艺参数有着密切关系.

Abstract: The defects in large area diamond films prepared by DC arc plasma jet CVD method are researched. The defects in diamond films are investigated, including the surface, bulk, boundry defects and the macro-cracks and micro-cracks caused by internal stresses. The results show that the growth parameters often led to defects in diamond films.