强直电流伸展弧CVD硬质合金金刚石涂层工具

Large Area Diamond Coatings on Cemented Carbide Tools by a High Current Extended DC Arc Plasma CVD System

摘要: 采用自行研制的强电流直流扩展电弧设备对酸浸和渗硼预处理的YG6刀片进行了金刚石薄膜涂层沉积,并对放于不同位置的沉积刀片表面涂层的激光Raman谱和SEM形貌进行了分析、研究.结果表明:渗硼预处理工艺优于酸浸预处理工艺;在渗硼处理的GY6刀片上,沉积的金刚石薄膜涂层具有大面积、均匀性好和质量高的特点.

Abstract: High current extended DC arc plasma equipment was manufactured to carry out CVD film deposition on acid-etching and boronizing samples of the cemented carbide cutter YG6, and the surface coating of deposition at different positions of the blade were analyzed by Raman spectra and SEM. The results show that the boronizing pretreatment technology is superior to the acid etching pretreatment technology, for CVD film coating on the blade by boronizinf pretreatment has advantages of large area, good homogeneity and high quality.