激光超声检测共焦球面法布里-珀罗干涉仪

Design and fabrication of confocal fabry-perot interferometers used in laser-ultrasonic detection

  • 摘要: 从理论上对共焦球面法布里-珀罗干涉仪的自由光谱范围、透射谱线半宽度、精细度、光谱分辨率等光学参数进行了分析,并根据激光超声检测的特点和要求,设计制作了一台实验室用的共焦球面法布里-珀罗干涉仪.利用单片机对该干涉仪的腔长和工作点进行控制,成功实现了激光超声的非接触测量.

     

    Abstract: The main optical parameters of Confocal Fabry-Perot Interferometers (CFPI), including free spectral range, minimum resolvable frequency difference (instrumental bandpass), finesse, spectral resolving power, were discussed. According to the requirement and feature of laser-ultrasonic detection, a CFPI used in laboratory was designed and fabricated. The CFPI's cavity length and operation point were controlled by a micro-single computer. Laser-ultrasonic non-contact detection is carried out successfully with the CFBI.

     

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