悬浮床氮化硅合成热过程的实验研究与数值模拟
Experiment research and numerical simulation of thermal process in a suspended bed for Si3N4 synthesis
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摘要: 针对基于流态化技术利用硅粉直接氮化合成氮化硅粉的新工艺,建立了悬浮床内热过程的二维数学模型,并借助CFD商业软件FLUENT对悬浮床内热过程进行了数值模拟,分析了氮气速度、粉气比和氮化温度等因素对温度场和硅转化率的影响.结果表明,模拟计算值与实验值误差小于5%,该模型可以用来预测悬浮床内的热过程.在本文条件下,当以平均粒径2.7μm的硅粉为原料、氮化温度为1 380℃、氮化时间为54.5 s时,硅的转化率为22.5%.模型预测表明,如果将氮化温度升至1 450℃、氮化时间延长至7.1 min,那么硅转化率可达98.6%,氮化硅纯度达98%以上.Abstract: Aiming to a method for the synthesis of silicon nitride powder by direct nitridation process based on fluidization technology, a two-dimensional mathematical model of thermal process in a suspended bed was established, the thermal process was simulated based on the commercial CFD software FLUENT, and the effects of the flow velocity of nitrogen gas, the ratio of particle to gas and nitridation temperature on the temperature of the bed and the conversion rate of silicon were analyzed. The results show that the errors between simulation and experimental values are less than 5% and the model can be used to predict the thermal process in the suspended bed. Under the experimental conditions in this study, when the silicon powder with a particle size of 2.7 μm is used as raw materials, with a nitridation temperature of 1380℃ and nitridation time of 54.5 s, the conversion rate of silicon is 22.5%. Theoretical predictions suggest that if the nitridation temperature is increased to 1450℃ and the nitridation time is extended to 7.1 min, the conversion rate of silicon and the purity of silicon nitride should reach 98.6% and 98%, respectively.