Abstract: Combined compliant structures were classified and the conditions of non-linear deflection of the flexible beam in a combined compliant structure were given on the basis of the effect of structural parameters on the deflection characteristic of combined compliant structures.In consideration of the variable cross-section and the non-linear deflection of a compliant structure,the deflection characteristic of the compliant structure was studied and a non-linear compliant-body model used for deflection analysis was established.Finally a combined compliant structure formed with flexible hinges and a flexible beam was designed and machined,and its deflection was analyzed by pseudo-body modelling,imitate-compliant body modelling and non-linear compliant-body modelling.Meantime,the deflection caused by electrostatic drive was tested.The results show that,the calculated data with the non-linear compliant-body model is most similar to the test results,proving the validity of this model and the analytical method.