玻璃与金属封接过程中气孔率和玻璃飞溅

Porosity and glass sputtering in the sealing process of glass to metal

  • 摘要: 通过测量不同工艺条件下玻璃绝缘子中的气孔率和最大气泡直径,以及观察底盘表面的玻璃飞溅情况,研究了熔封气氛、熔封温度、熔封时间、氧化膜类型和厚度对玻璃绝缘子中气孔率和玻璃飞溅的影响.结果表明,玻璃绝缘子中气孔率与可伐合金底盘表面的飞溅程度有一定的关系.可伐合金表面Fe3O4氧化物与玻璃中SiO2发生化学反应是玻璃绝缘子中气泡的一个重要来源,也是引起玻璃飞溅的因素.熔封气氛和氧化膜厚度对气孔率和玻璃飞溅影响最大.推荐的工艺条件是在可伐合金表面生成厚度约1μm的FeO氧化膜,然后与玻坯在950~980℃工厂条件的气氛中熔封30~40 min.

     

    Abstract: The effects of sealing atmosphere,sealing temperature,sealing time,oxides' type and thickness on porosity and glass sputtering were investigated by measuring the porosity and the maximum diameter of gas bubbles in the glass insulator and observing the glass sputtering state on the surface of kovar alloy under various process conditions.It is indicated that there is a relationship between the porosity of the glass insulator and the glass sputtering grade on the surface of Kovar alloy.The chemical reaction between Fe3O4 on the surface of Kovar alloy and SiO2 in glass is an important source of porosity in the glass insulator,and it is also an influence factor of glass sputtering.Sealing atmosphere and oxides' thickness are the most important factors for porosity and glass sputtering.The recommended conditions are that FeO is formed on the surface of Kovar alloy and its thickness is about 1 μm,the sealing temperature is about from 950 to 980℃ and the sealing time is from 30 to 40 min in the real production atmosphere.

     

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