Abstract: Contact strain measurement is a tool for studying the high temperature mechanical behavior of components and materials. The measurement precision is the key point of the high temperature strain measurement field, where creep is the main factor that affects the measurement precision at high temperature. In this paper, the creep characteristics of strain gauges were analyzed according to the material mechanism of creep by a high temperature strain measurement system. A grating creep model was obtained from the creep rule and experiment measurement results. Based on the grating creep model, the influence factors of strain gauge creep output were studied by the finite element model. Finally, a compensation model of high temperature strain creep was established to improve this high temperature strain measurement precision, and it was validated by experimental data.