Surface State of Fine Si3N4 Powders Made from Thermal Decomposition of SilicOn-Imide
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Abstract
Si3N4 powders made from imide process and thermal decomposed at different temperatures have investigated by XPS surface analysis; They were compared with a commercial Si3N4 powder made with nitridation process. Oxygen both in combined form of Si2.2-2.7N2.9-3.7O layer and absorbed form were found on the powder surface, in contrast to Si0.8 N0.8O layer and absorbed form in the case of Si3N4 powders made from Si aitridation.
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