Texture Analysis of CVD Diamond Thin Films

Different textures of CVD diamond thin films are analyzed using the methods of pole figure and orientation distribution function. It is shown that the higher multiplicity leads to the higher appearance possibility of 110 fiber texture. The formation mechanism of 221 fiber texture by means of twinning effect is discussed. The importance of the systematic investigation on the relatonship between tetures and properties is emphasized, and the advanced methods for texture analysis are recommended.