HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
Citation: HUANG Tianbin, LIU Jingming, TANG Weizhong, ZHONG Guofang, JIANG Zheng, LU Fanxiu. Uniformity of Large Area Diamond Films[J]. Chinese Journal of Engineering, 2000, 22(5): 467-469. DOI: 10.13374/j.issn1001-053x.2000.05.019
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Uniformity of Large Area Diamond Films

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  • The uniformity of large area diamond filrns in deposition process and quality of diamond films is researched. The results show tha the DC arc used for deposition of diamond films is uniform. Diaxnond films are uniform in the process of nucleation and the growh. The quslity of large area diamond films is uniform.
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